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05A17
HaoRui
custom01001
Alumina microporous ceramic is the ideal material for electrostatic vacuum chucks due to its superior mechanical and thermal properties:
✔ High Precision & Stability – Maintains consistent adsorption force across the surface for accurate machining. ✔ Exceptional Thermal & Chemical Resistance – Withstands extreme temperatures and corrosive environments without degradation. ✔ Fine Micropore Structure – Allows for controlled air permeability, ensuring secure and efficient adsorption. ✔ Low Particle Generation – Reduces contamination risks, making it ideal for ultra-clean applications. ✔ Customizable Complex Shapes – Supports advanced CNC machining for tailored solutions.
Size Range: Ø5mm - Ø800mm
Micropore Size: 2-100μm
Porosity: 35-40% for optimized air permeability
Planar Accuracy:
6-8 inches: <3μm
12 inches: <5μm
Base Material Options: Alumina ceramic with bases available in stainless steel, aluminum alloy, and plastic
✅ Customization Requirements:
Dimensions, Thickness & Shape – Available in standard sizes (2, 3, 4, 5, 6, 8, 12 inches) and non-standard customizations to fit your specific needs.
✅ Ideal Applications:
Vacuum Lamination in Panel Manufacturing
Semiconductor Chip Packaging
Microelectronics Integrated Circuits
Precision Optical Component Manufacturing
Solar Photovoltaic Production
Shenzhen Haorui – Your Expert in Customized Black Alumina Ceramic Vacuum Suction Cups!
Material properties:
Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
colour | White | Light yellow | White | Black | Black | Grey | White |
Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. |
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
Alumina microporous ceramic is the ideal material for electrostatic vacuum chucks due to its superior mechanical and thermal properties:
✔ High Precision & Stability – Maintains consistent adsorption force across the surface for accurate machining. ✔ Exceptional Thermal & Chemical Resistance – Withstands extreme temperatures and corrosive environments without degradation. ✔ Fine Micropore Structure – Allows for controlled air permeability, ensuring secure and efficient adsorption. ✔ Low Particle Generation – Reduces contamination risks, making it ideal for ultra-clean applications. ✔ Customizable Complex Shapes – Supports advanced CNC machining for tailored solutions.
Size Range: Ø5mm - Ø800mm
Micropore Size: 2-100μm
Porosity: 35-40% for optimized air permeability
Planar Accuracy:
6-8 inches: <3μm
12 inches: <5μm
Base Material Options: Alumina ceramic with bases available in stainless steel, aluminum alloy, and plastic
✅ Customization Requirements:
Dimensions, Thickness & Shape – Available in standard sizes (2, 3, 4, 5, 6, 8, 12 inches) and non-standard customizations to fit your specific needs.
✅ Ideal Applications:
Vacuum Lamination in Panel Manufacturing
Semiconductor Chip Packaging
Microelectronics Integrated Circuits
Precision Optical Component Manufacturing
Solar Photovoltaic Production
Shenzhen Haorui – Your Expert in Customized Black Alumina Ceramic Vacuum Suction Cups!
Material properties:
Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
colour | White | Light yellow | White | Black | Black | Grey | White |
Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. |
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.