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Custom Electrostatic Vacuum Chuck Advanced Alumina Microporous Ceramic

The electrostatic vacuum chuck leverages the Coulombic force generated between the workpiece (the object under processing) and the electrode with applied voltage to securely adsorb the workpiece. Its principal advantages lie in the uniform distribution of adsorption force across the surface of the wafer, ensuring no warping or deformation occurs. The constant and stable adsorption force guarantees the precision of wafer processing while minimizing contamination and damage to the wafer, making it suitable for high-vacuum environments.
Availability:
Quantity:
  • 05A17

  • HaoRui

  • custom01001

Why Alumina Microporous Ceramic?

Alumina microporous ceramic is the ideal material for electrostatic vacuum chucks due to its superior mechanical and thermal properties:

✔ High Precision & Stability – Maintains consistent adsorption force across the surface for accurate machining. ✔ Exceptional Thermal & Chemical Resistance – Withstands extreme temperatures and corrosive environments without degradation. ✔ Fine Micropore Structure – Allows for controlled air permeability, ensuring secure and efficient adsorption. ✔ Low Particle Generation – Reduces contamination risks, making it ideal for ultra-clean applications. ✔ Customizable Complex Shapes – Supports advanced CNC machining for tailored solutions.

Key Specifications of Alumina Microporous Ceramic Electrostatic Chucks

  • Size Range: Ø5mm - Ø800mm

  • Micropore Size: 2-100μm


  • Porosity: 35-40% for optimized air permeability

  • Planar Accuracy:

    • 6-8 inches: <3μm

    • 12 inches: <5μm

  • Base Material Options: Alumina ceramic with bases available in stainless steel, aluminum alloy, and plastic



Customization Requirements:

Dimensions, Thickness & Shape – Available in standard sizes (2, 3, 4, 5, 6, 8, 12 inches) and non-standard customizations to fit your specific needs.



Ideal Applications:
Vacuum Lamination in Panel Manufacturing
Semiconductor Chip Packaging
Microelectronics Integrated Circuits
Precision Optical Component Manufacturing
Solar Photovoltaic Production

Shenzhen Haorui – Your Expert in Customized Black Alumina Ceramic Vacuum Suction Cups!


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Material properties:


Property 95%Al2O3 99%Al2O3 Zirconia Ceramics Silicon carbide (SiC) Silicon nitride (Si3N4) Aluminum Nitride (AlN) Machinable ceramics
colour White  Light yellow  White  Black Black  Grey  White
Density g/cm3 3.7g/cm3 3.9g/cm3 6.02g/cm3 3.2g/cm3 3.25g/cm3 3.2g/cm3 2.48g/cm3
water absorption 0 % 0 % 0 % 0 % 0 % 0 % 0 %
Hardness (HV) 23.7 23.7 16.5 33 20 - -
Flexural strength (MPa) 300MPa 400MPa 1100MPa 450MPa 800MPa 310MPa 91MPa
Compressive strength (MPa) 2500MPa 2800MPa 3600MPa 2000MPa 2600MPa - 340MPa
Young's modulus of elasticity 300GPa 300GPa 320GPa 450GPa 290GPa 310~350GPa 65GPa
heat conductivity 20W/m°C 32W/m°C 3W/m°C 50W/m°C 25W/m°C 150W/m°C 1.46W/m°C
dielectric strength 14KV/mm 14KV/mm 14KV/mm 14KV/mm 14KV/mm 14KV/mm 14KV/mm
Volume resistivity (25°C) >1014Ω·cm >1014Ω·cm >1014Ω·cm >105Ω·cm >1014Ω·cm >1014Ω·cm >1014Ω·cm
This data is typical of laboratory tests and the actual characteristics of specific production lots may vary.

Product customisation:

Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.

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Founded in June 2006, Shenzhen Haorui IndustriaI Technology Co.,Ltd. is a professional enterprise engaged in R&D, manufacturing and sales of non-standard industrial ceramics, hard alloys (tungsten steel) and various metal and non-metal precision machinery parts.

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