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05A06
HaoRui
custom01001
Shenzhen Haorui Industrial Technology Co., Ltd.
Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.
After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as wellas a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.
Porous ceramic materials include alumina and silicon carbide, which have excellent physical and chemical properties and can maintain stable performance in harsh environments such as high temperature, high pressure, and corrosion.
Product Specifications:
1、Base and frame material: aluminium alloy, stainless steel, ceramics
2、Size range：φ/5-500mm
3、Microporous size：1-700μm
4、Porosity：30-40%
5、Ventilation uniformity：10×10mm
6、Differential pressure in the area：±3Kpa
We can customize components in ways that perfectly match with the shape and material of the wafer, with your equipment and conditions.We will respond to your various dimensional and material needs to match your exact specification.Even if you require only a single piece for evaluation, do not hesitate to contact us. We are eager to customize chucks for multiple workpieces or for your testing purposes.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
Shenzhen Haorui Industrial Technology Co., Ltd.
Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.
After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as wellas a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.
Porous ceramic materials include alumina and silicon carbide, which have excellent physical and chemical properties and can maintain stable performance in harsh environments such as high temperature, high pressure, and corrosion.
Product Specifications:
1、Base and frame material: aluminium alloy, stainless steel, ceramics
2、Size range：φ/5-500mm
3、Microporous size：1-700μm
4、Porosity：30-40%
5、Ventilation uniformity：10×10mm
6、Differential pressure in the area：±3Kpa
We can customize components in ways that perfectly match with the shape and material of the wafer, with your equipment and conditions.We will respond to your various dimensional and material needs to match your exact specification.Even if you require only a single piece for evaluation, do not hesitate to contact us. We are eager to customize chucks for multiple workpieces or for your testing purposes.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Product customisation:
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
