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05A04
HaoRui
custom01001
Shenzhen Haorui Industrial Technology Co., Ltd.
Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.
After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as wellas a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.
Ceramic Vacuum Chuck
Porous ceramic chuck
Alternative name: vacuum suction cup
Material: Porous ceramic + stainless steel
Flatness: 0.05mm
Industry: Optical film
A type of suction cup that uses a porous ceramic material
Porous ceramics are unique in their countless number of pores that allow liquid or air to pass through. We took advantage of this principle to develop a vaccum chuck using porous ceramic material. Before this, fine holes had to be drilled manually.
However the indentations around the holes were found to be damaging the circuits on ultra-thin wafers. This new type of porous chuck solved that problem, opening the door to many new opportunities that allow users to hold wafers in non-damaging ways.
Porous ceramics are unique in their countless number of pores that allow liquid or air to pass through. We took advantage of this principle to develop a vacuum chuck using porous ceramic material. Before this, fine holes had to be drilled manually. However, the indentations around the holes were found to be damaging the circuits on ultra-thin wafers. This new type of porous chuck solved that problem, opening the door to many new opportunities that allow users to hold wafers in non-damaging ways.
The innovation of the porous ceramic vacuum chuck not only resolved the issue of circuit damage but also improved the overall efficiency of wafer handling. With its porous structure, the chuck provides a secure grip on the wafers without causing any harm. This advancement has revolutionized the semiconductor industry by enabling precise and safe handling of delicate ultra-thin wafers during various manufacturing processes. Additionally, the porous ceramic material offers durability and reliability, making it a preferred choice for semiconductor manufacturers worldwide. The vacuum chuck has become an essential tool in semiconductor fabrication, ensuring smooth production and high-quality output.
Ceramics can withstand harsh environments heated up to several hundred degrees celsius. This is the conditions under which porous resins cannot be used. We can customize components in ways that perfectly match with the shape and material of the wafer, with your equipment and conditions.
We will respond to your various dimensional and material needs to match your exact specification.
Even if you require only a single piece for evaluation, do not hesitate to contact us. We are eager to customize chucks for multiple workpieces or for your testing purposes.
Porous ceramic suction cups are mainly used in the semiconductor industry as fixtures for wafer transport and cleaning, and it also has a wide range of applications in medical and other fields.
Porous ceramic suction cups are generally made of ceramic materials with 1-2um、5um、10um、20um、30um、50um、100um pore size, and this special porous ceramic has the characteristics of uniform pore distribution and wear resistance.
Shenzhen HaoRui Ceramics has long been committed to the production of high-quality porous ceramic suction cups, which can replace the domestic products of the same level.
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
We can provide porous ceramics made of alumina and silicon carbide,
Our product parameters:
| Porosity | 40-50% |
| Pore size | 1-2um、5um、10um、20um、30um、50um、100um |
| Color | White, light brown, blue-grey, dark brown, black |
| Flatness control and test | multipoint detection, adsorption flatness within 0.005 |
| Chuck paralletism control | Parallelism of both sides 0.01 |
| Thickness of ceramic chuck | general thickness of ceramic chuck around 4.0mm |
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
Shenzhen Haorui Industrial Technology Co., Ltd.
Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.
After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as wellas a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.
Ceramic Vacuum Chuck
Porous ceramic chuck
Alternative name: vacuum suction cup
Material: Porous ceramic + stainless steel
Flatness: 0.05mm
Industry: Optical film
A type of suction cup that uses a porous ceramic material
Porous ceramics are unique in their countless number of pores that allow liquid or air to pass through. We took advantage of this principle to develop a vaccum chuck using porous ceramic material. Before this, fine holes had to be drilled manually.
However the indentations around the holes were found to be damaging the circuits on ultra-thin wafers. This new type of porous chuck solved that problem, opening the door to many new opportunities that allow users to hold wafers in non-damaging ways.
Porous ceramics are unique in their countless number of pores that allow liquid or air to pass through. We took advantage of this principle to develop a vacuum chuck using porous ceramic material. Before this, fine holes had to be drilled manually. However, the indentations around the holes were found to be damaging the circuits on ultra-thin wafers. This new type of porous chuck solved that problem, opening the door to many new opportunities that allow users to hold wafers in non-damaging ways.
The innovation of the porous ceramic vacuum chuck not only resolved the issue of circuit damage but also improved the overall efficiency of wafer handling. With its porous structure, the chuck provides a secure grip on the wafers without causing any harm. This advancement has revolutionized the semiconductor industry by enabling precise and safe handling of delicate ultra-thin wafers during various manufacturing processes. Additionally, the porous ceramic material offers durability and reliability, making it a preferred choice for semiconductor manufacturers worldwide. The vacuum chuck has become an essential tool in semiconductor fabrication, ensuring smooth production and high-quality output.
Ceramics can withstand harsh environments heated up to several hundred degrees celsius. This is the conditions under which porous resins cannot be used. We can customize components in ways that perfectly match with the shape and material of the wafer, with your equipment and conditions.
We will respond to your various dimensional and material needs to match your exact specification.
Even if you require only a single piece for evaluation, do not hesitate to contact us. We are eager to customize chucks for multiple workpieces or for your testing purposes.
Porous ceramic suction cups are mainly used in the semiconductor industry as fixtures for wafer transport and cleaning, and it also has a wide range of applications in medical and other fields.
Porous ceramic suction cups are generally made of ceramic materials with 1-2um、5um、10um、20um、30um、50um、100um pore size, and this special porous ceramic has the characteristics of uniform pore distribution and wear resistance.
Shenzhen HaoRui Ceramics has long been committed to the production of high-quality porous ceramic suction cups, which can replace the domestic products of the same level.
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
We can provide porous ceramics made of alumina and silicon carbide,
Our product parameters:
| Porosity | 40-50% |
| Pore size | 1-2um、5um、10um、20um、30um、50um、100um |
| Color | White, light brown, blue-grey, dark brown, black |
| Flatness control and test | multipoint detection, adsorption flatness within 0.005 |
| Chuck paralletism control | Parallelism of both sides 0.01 |
| Thickness of ceramic chuck | general thickness of ceramic chuck around 4.0mm |
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
