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05A17
HaoRui
custom01001
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers.
Why choose microporous ceramic vacuum chucks?
1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion.2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat, and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear.
Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure, and electrical insulation. So it is the best choice for vacuum chuck.
3. With its special porous structure, the microporous ceramic has very small holes and can be machined to very precise flatness. Combined with the special air channel design, when a certain negative pressure is given, the wafer can be smoothly and stably adsorbed on the vacuum chuck, so as to avoid wafers that will cause scratches and dents on the surface.
Through the coordination of the focus point and suction force of the vacuum suction cup, wafers of different sizes can be adsorbed on the same ceramic surface.
4. The microporous ceramic vacuum chuck can be reused after regrinding, thereby improving the utilization rate of materials.
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
Color :White, light brown, blue-grey, dark brown, black
Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.
After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as wellas a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
FAQ
A:We are a professional manufacturer of ceramic parts. we are factory.
A: All parts can be customized according to you drawings and will meeting your requirements perfectly.
A: Of course, we will consider discounts for large-volume orders.
A: Yes, we promise to provide quality assurance for all products, inspect according to your drawings and issue an inspection report. If you are not satisfied with our product quality or service, please feel free to give us feedback.
A: Of course, welcome your arrival, please contact us in advance and make an appointment.
A: Yes, we could offer the sample for free charge but do not pay the cost of freight.
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.If you have another question, pls feel free to contact us as below:
sales@szhr-tech.com
Vacuum chucks are used in the thinning, dicing, cleaning, handling, and other processes of semiconductor electronic chips, like wafers.
Why choose microporous ceramic vacuum chucks?
1. During the polishing and cleaning process of wafers, polishing liquid and water mist enter the working table, causing corrosion. And the microporous ceramic vacuum chucks resist corrosion.2. The microporous ceramic vacuum chuck has no environmental pollution such as light, heat, and electromagnetic, unlike the rubber or other materials vacuum chuck. And the rubber or other materials vacuum chuck will be in direct contact with the surface of the item, so it is very easy to wear.
Therefore, the porous ceramic has high temperature resistance and chemical corrosion resistance, light structure, and electrical insulation. So it is the best choice for vacuum chuck.
3. With its special porous structure, the microporous ceramic has very small holes and can be machined to very precise flatness. Combined with the special air channel design, when a certain negative pressure is given, the wafer can be smoothly and stably adsorbed on the vacuum chuck, so as to avoid wafers that will cause scratches and dents on the surface.
Through the coordination of the focus point and suction force of the vacuum suction cup, wafers of different sizes can be adsorbed on the same ceramic surface.
4. The microporous ceramic vacuum chuck can be reused after regrinding, thereby improving the utilization rate of materials.
Non-standard parts customisation, due to the different requirements of product size, material material, processing accuracy, etc., resulting in material costs, processing costs, packaging logistics and other costs will be different. When ordering, please be sure to contact customer service, as much as possible to provide information about the parts (drawings or samples, use of the environment, etc.) and your requirements (quantity, delivery date, etc.), our company will recommend you to meet your requirements of the product programme and quotation.
Color :White, light brown, blue-grey, dark brown, black
Founded in June 2006, the company is a professional enterprise specialising in the research, development, manufacture and sales of non-standard industrial ceramics, cemented carbide (tungsten steel), and all kinds of metallic and non-metallic precision mechanical parts.
After more than 15 years of development, we have accumulated rich experience in the industry and cultivated a group of professional technicians. We have a perfect production process and quality management system, as wellas a set of precision machining equipment and testing equipment. At present, we have more than 3,000 customers at home and abroad, and have cooperated with more than 30 colleges and research institutes, and have a highreputation and good word of mouth in the same industry, the company's overall strength is in the leading position in the industry.
Material properties:
| Property | 95%Al2O3 | 99%Al2O3 | Zirconia Ceramics | Silicon carbide (SiC) | Silicon nitride (Si3N4) | Aluminum Nitride (AlN) | Machinable ceramics |
| colour | White | Light yellow | White | Black | Black | Grey | White |
| Density g/cm3 | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 | 2.48g/cm3 |
| water absorption | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % | 0 % |
| Hardness (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - | - |
| Flexural strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa | 91MPa |
| Compressive strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - | 340MPa |
| Young's modulus of elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa | 65GPa |
| heat conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C | 1.46W/m°C |
| dielectric strength | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Volume resistivity (25°C) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm |
| This data is typical of laboratory tests and the actual characteristics of specific production lots may vary. | |||||||
FAQ
A:We are a professional manufacturer of ceramic parts. we are factory.
A: All parts can be customized according to you drawings and will meeting your requirements perfectly.
A: Of course, we will consider discounts for large-volume orders.
A: Yes, we promise to provide quality assurance for all products, inspect according to your drawings and issue an inspection report. If you are not satisfied with our product quality or service, please feel free to give us feedback.
A: Of course, welcome your arrival, please contact us in advance and make an appointment.
A: Yes, we could offer the sample for free charge but do not pay the cost of freight.
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.If you have another question, pls feel free to contact us as below:
sales@szhr-tech.com
