Views: 0 Author: Site Editor Publish Time: 2025-03-19 Origin: Site
Microporous ceramics are an essential industrial material widely used in high-tech applications. Unlike traditional ceramics, which are typically dense and non-porous, microporous ceramics feature a network of microscopic pores that allow for controlled gas and liquid permeability. These advanced materials are particularly valued for their high adsorption capability, uniform pore distribution, and superior wear resistance.
At Shenzhen Haorui Industrial Technology, we specialize in custom high-end microporous ceramic vacuum chucks, also known as porous ceramics or ceramic chucks. These products are crucial for adsorption, transportation, and processing of delicate materials such as silicon wafers, ceramic sheets, flexible screens, glass panels, circuit boards, and other non-metallic components.
Porous ceramics can be classified based on pore size, phase composition, and structural characteristics:
Macroporous Ceramics (>500μm)
Large Pore Ceramics (100–500μm)
Medium Pore Ceramics (10–100μm)
Small Pore Ceramics (1–50μm)
Fine Pore Ceramics (0.1–1μm)
Microporous Ceramics (<0.1μm)
Uniform Pore Structure: Ensures consistent performance and even adsorption force.
Non-Uniform Pore Structure: Used for applications requiring varied permeability levels.
Microporous ceramics belong to the functional structural ceramics category. These ceramics contain numerous open or closed microscopic pores, typically in the micron or sub-micron range, making them invisible to the naked eye. This specialized structure allows for precise control of airflow, vacuum pressure, and liquid permeability, making them highly valuable in precision industries.
In everyday life, microporous ceramics can be found in products such as water purifier filters and e-cigarette atomization cores. However, their most critical applications are in high-precision industrial processes, particularly in semiconductor and electronics manufacturing.
Microporous ceramic vacuum chucks are extensively used in semiconductor manufacturing, wafer processing, and precision optics. These vacuum chucks provide a stable, even adsorption force, preventing warping, deformation, and contamination of delicate materials.
✔ Uniform Pore Distribution – Ensures stable and even vacuum adsorption. ✔ High Wear Resistance – Suitable for long-term precision applications. ✔ Ultra-Fine Pores (1μm – 100μm) – Ideal for delicate materials like wafers and glass. ✔ Flatness Accuracy of 0.030mm – Guarantees precise and stable positioning. ✔ High Porosity (20% – 40%) – Enhances vacuum efficiency and reduces energy consumption. ✔ Customizable Specifications – Available in different sizes, shapes, and materials (Al₂O₃, SiC, Si₃N₄, etc.).
✔ Semiconductor wafer handling and processing✔ Glass and optical component manufacturing✔ Precision circuit board processing✔ Medical device fabrication✔ Flexible and OLED display production✔ Microelectronics and photonics assembly
The working structure of the vacuum chuck consists of two main parts:
Microporous Ceramic Layer: Provides uniform adsorption and prevents material deformation.
Sealing Ring: Ensures airtight vacuum operation.
The special microporous ceramic material used in our vacuum chucks features precisely controlled pore sizes (2-3μm), which are resistant to clogging and capable of strong vacuum adsorption. This structure enables secure partial-area adsorption, preventing damage to thin or fragile workpieces.
At Shenzhen Haorui Industrial Technology, we have extensive experience in manufacturing high-performance microporous ceramic vacuum chucks. Our advanced production techniques allow us to produce chucks with pore sizes ranging from 2μm to 200μm, catering to a wide range of industrial needs.
✔ OEM & ODM Services – Fully customizable chucks for unique applications.
✔ Precision Engineering – Achieving ultra-flat surfaces with high tolerance.
✔ Quality Assurance – All products undergo strict testing to meet international standards.
✔ Competitive Pricing – Direct factory manufacturing ensures the best value.
Looking for a reliable supplier of high-quality microporous ceramic vacuum chucks? We provide customized solutions for various industries, including semiconductors, electronics, medical devices, and more.
Get in touch with us today to discuss your requirements!
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